Related Experiment Video
Updated: Sep 3, 2025

07:10
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
1.8K
ToF-SIMS Li Depth Profiling of Pure and Methylated Amorphous Silicon Electrodes After Their Partial Lithiation.
Yue Feng1, Bon Min Koo1, Antoine Seyeux2
1Laboratoire de Physique de la Matière Condensée, CNRS, Ecole Polytechnique, Institut Polytechnique de Paris, Palaiseau 91120, France.
ACS Applied Materials & Interfaces
|July 26, 2022
Summary
Methylated amorphous silicon films show unique lithium profiles due to nanovoids, influencing the lithiation mechanism. This study reveals how nanovoids facilitate lithium movement during the initial lithiation process.
Area of Science:
- Materials Science
- Electrochemistry
- Surface Science
Background:
- Amorphous silicon (a-Si:H) is a key material in energy storage.
- Understanding lithiation mechanisms is crucial for battery performance.
- Methylation of a-Si:H may alter its electrochemical properties.
Purpose of the Study:
- To investigate the lithiation mechanism in pure and methylated amorphous silicon thin films.
- To analyze the impact of nanovoids on lithium diffusion and concentration profiles.
- To model the observed lithium depth profiles using a developed simulation.
Main Methods:
- Time-of-flight secondary ion mass spectrometry (TOF-SIMS) for depth profiling.
- Partial lithiation of amorphous silicon thin films (a-Si:H and a-Si0.95(CH3)0.05:H).
- Development of a specific model to simulate lithium depth profiles.
Main Results:
- Lithiation causes swelling and roughening of the amorphous silicon active layer.
- No significant lithium diffusion was observed after current-induced lithiation in either material.
- Distinct lithium concentration profiles were observed, with a slow transition in methylated a-Si:H attributed to nanovoids.
Conclusions:
- Nanovoids in methylated amorphous silicon act as quasi-percolating paths for lithium during initial lithiation.
- The developed model successfully simulates the observed lithium depth profiles, supporting the nanovoid hypothesis.
- Methylation significantly alters the lithiation behavior of amorphous silicon thin films.

