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Motion and Load Analysis of the Flexible Platform Based on Noncontact Processing.

Chao Lin1, Mingdong Jiang1, Ping Xu2

  • 1State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China.

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|July 27, 2022
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Summary

This study analyzes flexible hinge positioning stages for noncontact machining. The research confirms that coupled displacements are nanoscale, meeting micron-level machining accuracy requirements.

Keywords:
compliant mechanismcoupled displacementmotion trajectorynoncontact processingstiffness

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Area of Science:

  • Mechanical Engineering
  • Precision Engineering

Background:

  • Noncontact processing requires highly accurate positioning stages.
  • Flexible hinge mechanisms offer potential for precise motion control.

Purpose of the Study:

  • To investigate the applicability of flexible hinge-based positioning stages for noncontact processing.
  • To analyze coupled displacements and performance variations under external loads.

Main Methods:

  • Applied Hooke's law, Euler-Bernoulli beam theory, and geometric analysis.
  • Developed coupled-displacement and external-load matrices.
  • Derived platform displacement expression for noncontact machining.
  • Utilized finite element analysis (FEA) and experimental validation.

Main Results:

  • Coupled displacements in X and Y directions are nanoscale.
  • Z-direction coupled displacement due to external load is nanoscale.
  • Displacements are approximately one-thousandth of the output, meeting micron-level tracking accuracy.

Conclusions:

  • The flexible hinge positioning stage is suitable for noncontact processing.
  • Theoretical analysis is validated by FEA and experimental results.
  • The stage achieves the required tracking accuracy for precision machining.