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Design and Thermal Analysis of Flexible Microheaters

Dezhao Li1, Yangtao Ruan1, Chuangang Chen1

  • 1Zhejiang Provincial Key Laboratory of Quantum Precision Measurement, Collaborative Innovation Center for Information Technology in Biological and Medical Physics, College of Science, Zhejiang University of Technology, Hangzhou 310023, China.

Micromachines
|July 27, 2022
PubMed

Keywords:
PID controlfast responsegraphene thin filmheating wire structuremicroheater

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