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Updated: Sep 2, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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Published on: April 1, 2020

Reconfigurable scan lens based on an actively controlled optical phased array.

Sheng-I Kuo, Ju-Wei Wang, Zohauddin Ahmad

|August 1, 2022

Summary

This summary is machine-generated.

This study presents a chip-scale reconfigurable scan lens using an optical phased array. It enables precise laser scanning for applications like microscopy, achieving a focused spot size down to 2.7 µm.

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Area of Science:

Integrated photonics
Optical engineering
Microscopy

Background:

Integrated photonics enables miniaturization and reconfigurability of optical systems.
Optical phased arrays offer precise control over light beams.

Purpose of the Study:

To develop a chip-scale reconfigurable scan lens for laser-scanning microscopy.
To demonstrate the focusing, collection, and steering of light using the integrated photonic device.

Main Methods:

Fabrication of a 30-element optical phased array on an InP integrated photonic platform.
Configuration of phase shifters to control the optical beam.
Confocal measurements for depth-selective reflection detection.

Main Results:

Achieved scanning of a nearly diffraction-limited focused spot with a full width at half maximum (FWHM) spot size down to 2.7 µm at 1550 nm.
Demonstrated key laser-scanning microscope functions: focusing, collection, and steering.
Successfully performed confocal measurements for selective depth reflection detection.

Conclusions:

The chip-scale reconfigurable scan lens is a viable component for advanced laser-scanning microscopy.
Integrated photonics offers a pathway to compact and versatile optical imaging systems.
The demonstrated device integrates essential functions for high-resolution, depth-selective imaging.