Single-exposure height-recovery structured illumination microscopy based on deep learning

Modulation-based structured illumination microscopy (SIM) is performed to reconstruct three-dimensional (3D) surface topography. Generally speaking, modulation decoding algorithms mainly include a phase-shift (PS) method and frequency analysis technique. The PS method requires at least three images with fixed PSs, which leads to low efficiency. Frequency methods could decode modulation from a single image, but the loss of high-frequency information is inevitable. In addition, these methods all need to calculate the mapping relationship between modulation and height to recover the 3D shape. In this paper, we propose a deep learning enabled single-exposure surface measurement method. With only one fringe image, this method can directly restore the height information of the object. Processes such as denoising, modulation calculation, and height mapping are all included in the neural network. Compared with traditional Fourier methods, our method has higher accuracy and efficiency. Experimental results demonstrate that the proposed method can provide accurate and fast surface measurement for different structures.