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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Updated: Sep 2, 2025

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays

Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays

Published on: June 13, 2023

High resolution atomic force microscopy with an active piezoelectric microcantilever.

Hazhir Mahmoodi Nasrabadi¹, Mohammad Mahdavi¹, Mohammadreza Soleymaniha¹

¹Erik Jonsson School of Engineering and Computer Science, The University of Texas at Dallas, Richardson, Texas 75080, USA.

The Review of Scientific Instruments

|August 3, 2022

Summary

Active microcantilevers with integrated sensors and actuators achieve high-resolution Atomic Force Microscopy (AFM) imaging. This study details a novel sensing method that minimizes noise and feedthrough for precise measurements without optical sensors.

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Last Updated: Sep 2, 2025

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Area of Science:

Nanotechnology
Materials Science
Physics

Background:

Active microcantilevers offer advantages for tapping mode Atomic Force Microscopy (AFM) with on-chip sensing and actuation.
Collocated transduction enables feedback control for higher scan rates but suffers from feedthrough and noise, limiting imaging resolution.

Purpose of the Study:

Investigate noise sources affecting AFM microcantilevers with collocated aluminum nitride (AlN) actuator-sensor pairs.
Demonstrate high-resolution AFM using a novel high signal-to-noise ratio (SNR) sensing method.
Calibrate dynamic stiffness using on-chip sensors without optical methods.

Main Methods:

Utilized microcantilevers with collocated aluminum nitride (AlN) actuator-sensor pairs.
Developed and applied a high signal-to-noise ratio (SNR) sensing method.
Measured the Lorentzian response of cantilever Brownian motion at resonance for calibration.

Main Results:

Demonstrated very low feedthrough between actuation and sensing electrodes in AlN microcantilevers.
Achieved high-resolution AFM imaging on silicon carbide (SiC) gratings with nanometer-step terraces.
Successfully calibrated dynamic stiffness at the first fundamental resonance mode using the on-chip sensor.

Conclusions:

Active microcantilevers with AlN actuator-sensor pairs enable high-resolution AFM with minimal feedthrough.
The developed high SNR sensing method overcomes limitations of readout noise and feedthrough.
On-chip sensing provides a robust alternative for cantilever calibration, eliminating the need for optical sensors.