Design and Fabrication of a Tunable Optofluidic Microlens Driven by an Encircled Thermo-Pneumatic Actuator

This paper presents the design, simulation, fabrication, assembly, and testing of a miniature thermo-pneumatic optofluidic lens. The device comprises two separate zones for air heating and fluid pressing on a flexible membrane. A buried three-dimensional spiral microchannel connects the two zones without pumps or valves. The three-dimensional microfluidic structure is realized using a high-resolution three-dimensional printing technique. Multi-physics finite element simulations are introduced to assess the optimized air chamber design and the low-temperature gradient of the optical liquid. The tunable lens can be operated using a direct-current power supply. The temperature change with time is measured using an infrared thermal imager. The focal length ranges from 5 to 23 mm under a maximum voltage of 6 V. Because of the small size and robust actuation scheme, the device can potentially be integrated into miniature micro-optics devices for the fine-tuning of focal lengths.