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Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer.

Heng Liu1, Yu Zhang1, Jiale Wu1

  • 1School of Electronic & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.

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Summary
This summary is machine-generated.

This study analyzes a micromechanical resonant accelerometer, detailing parameters that enhance its sensitivity. Optimized design and a 2V detection voltage yield a sensitivity of 321 Hz/g, crucial for precise acceleration measurement.

Keywords:
Allan variancefrequency stabilityresonant accelerometerself-excited oscillationsensitivity

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Area of Science:

  • Mechanical Engineering
  • Electrical Engineering
  • Physics

Background:

  • Micromechanical resonant accelerometers are vital for inertial navigation and sensing applications.
  • Understanding electrostatic stiffness is key to improving accelerometer performance.

Purpose of the Study:

  • To analyze the dynamic equation of a micromechanical resonant accelerometer based on electrostatic stiffness.
  • To identify parameters influencing accelerometer sensitivity and stability.
  • To evaluate the accelerometer's performance using Allan variance analysis.

Main Methods:

  • Dynamic equation analysis of electrostatic stiffness.
  • Establishment of the dynamic equation for closed-loop self-excited drive.
  • Application of the average period method for stability analysis.
  • Allan variance analysis for performance evaluation.

Main Results:

  • Sensitivity is enhanced by increasing proof mass and capacitor plate area, decreasing fold beam stiffness and initial capacitor distance, and increasing detection voltage.
  • A sensitivity of 321 Hz/g was achieved at 2V detection voltage.
  • Frequency deviation of 0.04 Hz and amplitude deviation of 0.06 mV were observed within 30 min at room temperature.
  • Resolution improved to 56ug with a temperature error of ±0.01 °C.
  • The fully overlapping Allan variance analysis method (FOAV) offers the highest accuracy but requires significant data and time.

Conclusions:

  • The study provides a comprehensive analysis of micromechanical resonant accelerometer dynamics and sensitivity.
  • Design parameters for enhanced sensitivity and stability have been identified.
  • The accelerometer demonstrates high precision and stability, with potential for further improvement.