Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach-Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10^-3 W/kPa and the linearity was 5.9 × 10^-3. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field.