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Related Experiment Video

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Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer.

Chen Li1,2,3, Chi Zhang1, Lijun Yang1

  • 1School of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi'an 710021, China.

Micromachines
|August 26, 2022
PubMed
Summary

This study introduces a novel ridge waveguide pressure sensor using a Mach-Zehnder interferometer for precise optical pressure measurement. The developed microelectromechanical system (MEMS) sensor offers high sensitivity and fast response for small pressure detection.

Keywords:
Mach–Zehnder interferometerdirectional couplerpressure sensorridge waveguidesilicon on insulator

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Area of Science:

  • Photonics
  • Optical Sensing
  • Microelectromechanical Systems (MEMS)

Background:

  • Limited methods exist for measuring optical pressure with MEMS.
  • Optical pressure sensing demands high precision and rapid response.

Purpose of the Study:

  • To design and optimize a ridge waveguide pressure sensor based on a Mach-Zehnder interferometer.
  • To evaluate the sensor's performance for micro-pressure measurement applications.

Main Methods:

  • Design and optimization of a ridge waveguide structure.
  • Integration into a Mach-Zehnder interferometer configuration.
  • Characterization of sensor sensitivity and linearity.

Main Results:

  • Achieved a sensor sensitivity of 2.2 × 10-3 W/kPa.
  • Demonstrated a linearity of 5.9 × 10-3.
  • The sensor exhibits good performance and a compact form factor.

Conclusions:

  • The developed Mach-Zehnder interferometer-based ridge waveguide sensor is effective for optical pressure measurement.
  • Its high precision and fast response make it suitable for detecting small pressures.
  • Potential applications include biomedicine and other fields requiring micro-pressure sensing.