Tuning of silicon nitride micro-cavities by controlled nanolayer deposition

Integration of single-photon emitters (SPEs) with resonant photonic structures is a promising approach for realizing compact and efficient single-photon sources for quantum communications, computing, and sensing. Efficient interaction between the SPE and the photonic cavity requires that the cavity's resonance matches the SPE's emission line. Here we demonstrate a new method for tuning silicon nitride (Si₃N₄) microring cavities via controlled deposition of the cladding layers. Guided by numerical simulations, we deposit silicon dioxide (SiO₂) nanolayers onto Si₃N₄ ridge structures in steps of 50 nm. We show tuning of the cavity resonance exceeding a free spectral range (FSR) of 3.5 nm without degradation of the quality-factor (Q-factor) of the cavity. We then complement this method with localized laser heating for fine-tuning of the cavity. Finally, we verify that the cladding deposition does not alter the position and spectral properties of nanoparticles placed on the cavity, which suggests that our method can be useful for integrating SPEs with photonic structures.