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Updated: Aug 29, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
A Thermal-Switchable Metamaterial Absorber Based on the Phase-Change Material of Vanadium Dioxide
Zhongbao Wang1, Yanli Ma1, Ming Li2
1The College of Electronic Science, National University of Defense Technology, Changsha 410073, China.
Abstract:
This article presents a thermal-switchable metamaterial absorber (TSMA) based on the phase-change material of vanadium dioxide (VO2). VO2 thin film was deposited on sapphire substrate by magnetron sputtering followed by vacuum annealing treatment. Then, the prepared VO2 film was sliced into tiny chips for thermal-switchable elements. The surface structure of TSMA was realized by loading four VO2 chips into a square metallic loop. The absorption frequency of TSMA was located at 7.3 GHz at room temperature and switched to 6.8 GHz when the temperature was heated above the critical phase transition temperature of VO2. A VO2-based TSMA prototype was fabricated and measured to verify this design. The design is expected to be used in metasurface antennas, sensors, detectors, etc.

