Affordable Open-Source Quartz Microbalance Platform for Measuring the Layer Thickness

Area of Science:

• Materials Science
• Physics
• Engineering

Background:

• Quartz crystal microbalance (QCM) is a standard technique for monitoring thin-film deposition.
• Commercial QCM devices often lack advanced signal processing for precise control.
• Existing systems offer limited process parameter insights and sputtering rate approximations.

Purpose of the Study:

• To present a novel, open-source instrument concept for enhanced thin-film thickness measurement.
• To improve process control and enable easy replication of the monitoring system.
• To contribute to the open-source movement by updating obsolete technologies.

Main Methods:

• Development of a new instrument based on open-source data and novel ideas.
• Implementation of advanced signal processing for QCM frequency data.
• Integration of the device as an expandable controller for sputtering machines.

Main Results:

• The developed instrument provides a fast, inexpensive, and reliable method for thin-film thickness monitoring.
• The system offers better control over vacuum sputtering and evaporation process parameters.
• The project successfully integrates contemporary technology, replacing outdated methods.

Conclusions:

• The open-source QCM instrument enhances the capabilities of existing sputtering equipment.
• This project offers a practical, cost-effective solution for precise thin-film monitoring.
• The work supports the open-source community with a valuable and replicable scientific tool.