A Fully Integrated CMOS-controlled Scalable Microfluidics and Pneumatic-free Cell Actuation and Cytometry Sensing...

Moore's law has enabled massive scaling of complex computing and sensing systems in modern-day chip-scale architectures allowing extremely high yield and system complexity at very low-cost. Exploiting such Moore's law, we explore silicon-based integrated circuits and chip-scale systems to interface with biological fluids to manipulate, sense, and detect cells in real-time for an end-to-end low cost, miniaturized, and high sensitivity point-of-care diagnostics platform. Elimi-nating the need for complex, expensive, large and bulky syringe pumps and optical-based cytometers, the proposed system allows pneumatic-free AC electro-osmosis bulk fluid driving capabilities controlled by the CMOS chip, and integrated dielectrophoretic cell actuation with 2μm focusing accuracy, impedance spectroscopy sensing, and separation capabilities. The paper presents, for the first-time, a CMOS-driven cellular sensing platform for microfluidics that can be translated to a wide range of biomedical applications.