Soft-Clamped Silicon Nitride String Resonators at Millikelvin Temperatures
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Updated: Aug 28, 2025

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Thomas Gisler1, Mohamed Helal1, Deividas Sabonis1
1Laboratory for Solid State Physics, ETH Zürich, 8093 Zürich, Switzerland.
Abstract:
We demonstrate that soft-clamped silicon nitride strings with a large aspect ratio can be operated at mK temperatures. The quality factors (Q) of two measured devices show consistent dependency on the cryostat temperature, with soft-clamped mechanical modes reaching Q>10^{9} at roughly 46 mK. For low optical readout power, Q is found to saturate, indicating good thermalization between the sample and the stage it is mounted on. Our best device exhibits a calculated force sensitivity of 9.6 zN/sqrt[Hz] and a thermal decoherence time of 0.38 s, which bode well for future applications such as nanomechanical force sensing.

