The dimensional crossover of quantum transport properties in few-layered Bi₂Se₃ thin films

Topological insulator bismuth selenide (Bi₂Se₃) thin films with a thickness of 6.0 quintuple layers (QL) to 23 QL are deposited using pulsed laser deposition (PLD). The arithmetical mean deviation of the roughness (R _a) of these films is less than 0.5 nm, and the root square mean deviation of the roughness (R _q) of these films is less than 0.6 nm. Two-dimensional localization and weak antilocalization are observed in the Bi₂Se₃ thin films approaching 6.0 nm, and the origin of weak localization should be a 2D electron gas resulting from the split bulk state. Localization introduced by electron-electron interaction (EEI) is revealed by the temperature dependence of the conductivity. The enhanced contribution of three-dimensional EEI and electron-phonon interaction in the electron dephasing process is found by increasing the thickness. Considering the advantage of stoichiometric transfer in PLD, it is believed that the high quality Bi₂Se₃ thin films might provide more paths for doping and multilayered devices.