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Updated: Aug 28, 2025

Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
Anisotropic properties of pipe-GaN distributed Bragg reflectors
Chia-Jung Wu1, Yi-Yun Chen1, Cheng-Jie Wang1
1Department of Materials Science and Engineering, Innovation and Development Center of Sustainable Agriculture, Research Center for Sustainable Energy and Nanotechnology, National Chung Hsing University Taichung, 145 Xingda Rd., South Dist. Taichung 402 Taiwan hengjui0109@dragon.nchu.edu.tw cflin@dragon.nchu.edu.tw.
Abstract:
We report here a simple and robust process to convert periodic Si-doped GaN/undoped-GaN epitaxial layers into a porous-GaN/u-GaN distributed Bragg reflector (DBR) structure and demonstrate its material properties in a high-reflectance epitaxial reflector. Directional pipe-GaN layers with anisotropic optical properties were formed from n+-GaN : Si layers in a stacked structure through a lateral and doping-selective electrochemical etching process. Central wavelengths of the polarized reflectance spectra were measured to be 473 nm and 457 nm for the pipe-GaN reflector when the direction of the linear polarizer was along and perpendicular to the pipe-GaN structure. The DBR reflector with directional pipe-GaN layers has the potential for a high efficiency polarized light source and vertical cavity surface emitting laser applications.
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