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Optical Enhancement of Diffraction Efficiency of Texas Instruments Phase Light Modulator for Beam Steering in Near
Jiafan Guan1, Zhipeng Dong1, Xianyue Deng1
1James C. Wyant College of Optical Science, University of Arizona, 1630 E. University Blvd., Tucson, AZ 85719, USA.
Micromachines
|September 23, 2022
Summary
MEMS mirror arrays enhance lidar systems with adaptive beam steering. Light-recycling optics double piston motion range, improving diffraction efficiency for infrared applications.
Area of Science:
- Optics and Photonics
- Micro-electro-mechanical Systems (MEMS)
Background:
- Micro-electro-mechanical Systems (MEMS) mirror arrays enable high-speed, adaptive beam steering for Lidar systems.
- Diffraction efficiency in MEMS-based Phase Light Modulators (PLM) is limited by the piston motion range, particularly for infrared wavelengths.
Purpose of the Study:
- To optically enhance the piston motion range of MEMS mirror arrays.
- To improve diffraction efficiency for infrared beam steering applications.
Main Methods:
- Implementation of a light-recycling optical architecture based on Talbot self-imaging.
- Design and testing of a MEMS-PLM for visible wavelengths adapted for infrared use.
Main Results:
- Achieved an optical enhancement of the piston motion range by a factor of two.
- Demonstrated high-efficiency beam steering at an infrared wavelength of 1550 nm.
- Improved diffraction efficiency by 30% using the proposed optical architecture.
Conclusions:
- The light-recycling optics effectively enhance MEMS-PLM piston motion range.
- This approach enables visible-wavelength MEMS-PLMs to achieve high-efficiency infrared beam steering.
- The technology offers a pathway to more intelligent and adaptive Lidar systems.

