Computational Study on Thermal Motion Sensors That Can Measure Acceleration and Rotation Simultaneously

Kamran Siddique1, Yoshifumi Ogami1

  • 1Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu 525-8577, Shiga, Japan.

Sensors (Basel, Switzerland)
|September 23, 2022
PubMed
Summary

This study introduces a novel numerical simulation technique for simultaneous measurement of acceleration and rotation using modified thermal motion sensors. Computational fluid dynamics (CFD) simulations reveal temperature correlations for multi-quantity sensing.

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