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Fast Inline Microscopic Computational Imaging.

Laurin Ginner1, Simon Breuss1, Lukas Traxler1

  • 1AIT Austrian Institute of Technology GmbH, 1210 Vienna, Austria.

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|September 23, 2022
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Summary
This summary is machine-generated.

A new light-field and photometry system enables high-speed, high-resolution 3D inline inspection for manufacturing. This innovative microscopic imaging achieves precise depth and lateral sampling, overcoming physical limitations in industrial quality control.

Keywords:
3D imaginginline inspectionmicroscopy

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Area of Science:

  • Optics and Photonics
  • Industrial Metrology
  • Microscopy

Background:

  • Inline inspection is crucial for high-quality industrial production.
  • Achieving high-speed, high-resolution 3D imaging presents significant physical challenges.
  • Existing systems often struggle to balance field of view with spatial resolution.

Purpose of the Study:

  • To present a novel light-field and photometry system for overcoming imaging limitations in inline inspection.
  • To enable high-resolution 3D imaging at industrially relevant speeds.
  • To address the trade-off between acquisition speed and imaging precision.

Main Methods:

  • Development of a novel light-field and photometry system combining microscopic imaging with special projection optics.
  • Utilizing a parallax effect generated by projection optics.
  • Implementation of an image processing pipeline with a lateral transport stage for changing optical perspective.

Main Results:

  • Achieved scanning speeds of up to 12 mm/s.
  • Obtained a depth resolution of 2.8 μm.
  • Reached a lateral sampling of 700 nm/pixel.

Conclusions:

  • The presented inline microscopic system effectively delivers high-resolution 3D images at high speeds.
  • The system is suitable for inspection tasks in the high-quality manufacturing industry.
  • This approach successfully addresses the limitations of current inline inspection technologies.