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Updated: Aug 27, 2025

A Microfluidic Chip for ICPMS Sample Introduction
Published on: March 5, 2015
A chip-based supersonic microfluidic nebulizer for efficient sample introduction into inductively coupled plasma -
E Mavrakis1, Z Toprakcioglu2, N Lydakis-Simantiris3
1Environmental Chemical Processes Laboratory, Department of Chemistry, University of Crete, Voutes Campus, Heraklion, 70013, Greece.
This study introduces a novel chip-based supersonic microfluidic nebulizer (chip-μf-Neb) for inductively-coupled plasma mass spectrometry (ICP-MS). This advancement enables sensitive metal determination in microfluidic systems, overcoming limitations of conventional nebulizers.
Area of Science:
- Analytical Chemistry
- Microfluidics
- Mass Spectrometry
Background:
- Increasing use of microfluidic chips for biological sample handling necessitates advanced analytical techniques.
- Conventional pneumatic micro-flow nebulizers for coupling microfluidics to ICP-MS suffer from dead volume and liquid suction issues.
- There is a need for improved nebulization methods for chip-based ICP-MS to enhance metal determination capabilities.
Purpose of the Study:
- To demonstrate the potential of a chip-based supersonic microfluidic nebulizer (chip-μf-Neb) for advancing metal determination in chip-based ICP-MS.
- To showcase the convenient coupling of the chip-μf-Neb to ICP-MS using a spray chamber with laminar flow makeup gas.
- To evaluate the system's performance at low liquid flow rates for sensitive metal quantitation.
Main Methods:
- Development and integration of a chip-based supersonic microfluidic nebulizer (chip-μf-Neb) with ICP-MS.
- Optimization of nebulization and makeup gas flow rates for maximum sensitivity and minimal oxide formation.
- Evaluation of the system's performance using indium (In) for sensitivity, silver (Ag) nanoparticles for transport efficiency, and single-cell analysis for selenium (Se) and arsenic (As).
Main Results:
- Achieved a maximum indium sensitivity of 40000 cps/(μg L⁻¹) at a flow rate of 10 μL min⁻¹.
- Demonstrated a transport efficiency of 46% for silver nanoparticles.
- Successfully detected selenium and arsenic in individual Chlamydomonas reinhardtii cells.
Conclusions:
- The chip-based supersonic microfluidic nebulizer (chip-μf-Neb) offers efficient operation at low liquid flow rates.
- The absence of self-aspiration makes this nebulizer a promising tool for chip-based ICP-MS.
- This technology advances metal quantitation by effectively combining microfluidics with ICP-MS.
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