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Updated: Aug 26, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Probing Electron Beam Induced Transformations on a Single-Defect Level via Automated Scanning Transmission Electron

Kevin M Roccapriore1, Matthew G Boebinger1, Ondrej Dyck1

  • 1Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee37831, United States.

ACS Nano
|October 7, 2022
PubMed

Keywords:
atomic defectsatomic fabricationautomated experimentdeep learningelectron beam patterningelectron irradiationscanning transmission electron microscopy

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