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Electrically controlled terahertz modulator with deep modulation and slow wave effect via a HEMT integrated
Optics Express
|October 12, 2022
Summary
We developed a novel terahertz (THz) modulator using a high electron mobility transistor (HEMT) integrated metasurface. This device achieves deep and fast modulation by combining slow wave effects and localized fields for advanced THz applications.
Area of Science:
- Terahertz (THz) technology
- Metamaterials and Plasmonics
- Semiconductor device engineering
Background:
- Terahertz (THz) modulators are crucial for high-speed communication and sensing.
- Achieving deep and fast modulation in THz modulators remains a challenge.
- Existing methods for electrical control of slow wave effects are often complex or inefficient.
Purpose of the Study:
- To propose and demonstrate a novel electrically controlled THz modulator.
- To leverage slow wave effects and localized fields for enhanced modulation performance.
- To introduce a new mechanism for high-performance THz modulation using HEMT-integrated metasurfaces.
Main Methods:
- Integration of a high electron mobility transistor (HEMT) with a metasurface structure.
- Electrical control of resonant modes through HEMT switches.
- Utilizing the confined electric field within the HEMT-embedded region.
- Analysis of slow wave effects and their impact on modulation.
Main Results:
- Achieved a high modulation depth of 96%.
- Demonstrated a significant group delay of 10.4 ps, indicative of the slow wave effect.
- Successfully controlled resonant modes electrically via HEMT switches, a novel approach.
Conclusions:
- The proposed HEMT-integrated metasurface offers a new and effective mechanism for THz modulation.
- The combination of slow wave effect and localized field leads to high-performance modulation.
- This work paves the way for advanced, electrically controlled THz modulators.

