Sensors for simultaneous measurement of temperature and humidity based on all-dielectric metamaterials

In this study, a new type of sensors based on all-dielectric metamaterials that can measure temperature and relative humidity simultaneously was designed and theoretically analyzed in detail. The proposed metamaterial sensor consists of a quartz substrate in the bottom layer, polydimethylsiloxane (PDMS) in the middle layer, and a periodic silicon structure on the top layer. CST Studio Suite was used to determine the transmission spectrum of the metamaterials in the near-infrared band using finite integration, and two transmission dips were observed. Then, polyvinyl alcohol (PVA) was used as the humidity-sensitive material to be coated on the surface of this metamaterial sensor, and these two transmission dips were used to measure the temperature and relative humidity simultaneously. Simulation results showed that the sensitivities of the two dips to the temperature are -0.224 and -0.069 nm/°C, and the sensitivities to the relative humidity are -0.618 and -0.521 nm/%, respectively. Based on the sensitivity matrix, the temperature and the relative humidity can be measured simultaneously. The proposed sensor has the advantages of polarization insensitivity, small size and low loss, which makes it have many application potentials in various research fields, including physics, biology and chemical sensing.