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    This study presents a novel microfabricated optomechanical accelerometer achieving percent-level accuracy without external calibration. This innovation utilizes intrinsic accuracy, potentially enhancing inertial guidance and remote sensing applications.

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    Area of Science:

    • Physics
    • Engineering
    • Metrology

    Background:

    • Traditional accelerometers often require costly external calibration.
    • Achieving high accuracy in inertial sensors is crucial for various applications.

    Purpose of the Study:

    • To demonstrate a microfabricated optomechanical accelerometer with intrinsic percent-level accuracy.
    • To reduce reliance on external calibration for accelerometers.

    Main Methods:

    • Utilized a mechanical model characterizing thermal noise response.
    • Employed an optical frequency comb readout for SI-traceable displacement measurements.
    • Evaluated intrinsic accuracy against a primary vibration calibration system and local gravity.

    Main Results:

    • Achieved 2.1% average agreement with a primary calibration system (0.1 kHz–15 kHz).
    • Demonstrated better than 0.2% accuracy for static acceleration measurements.
    • The optomechanical accelerometer showed high sensitivity, bandwidth, and dynamic range.

    Conclusions:

    • The developed accelerometer offers percent-level accuracy without external calibration.
    • This intrinsic accuracy approach can enhance inertial guidance systems and remote accelerometers.
    • The method shows potential for extension to other optomechanical transducers like force and pressure sensors.