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    This study enhances rigorous coupled wave analysis (RCWA) for multilayer metal-dielectric gratings. A new conversion relation improves reliability and convergence for complex structures, including microwave band applications.

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    Area of Science:

    • Optics and Photonics
    • Electromagnetics
    • Materials Science

    Background:

    • Rigorous Coupled Wave Analysis (RCWA) is a standard method for grating analysis.
    • Standard RCWA faces challenges with reliability for complex multilayer structures, especially those involving metal-dielectric components.

    Purpose of the Study:

    • To enhance the reliability and convergence of RCWA for multilayer gratings with metal-dielectric structures.
    • To introduce a novel conversion relation for modal solutions between Cartesian and transformed systems.

    Main Methods:

    • Utilized a 2D modal solution of RCWA with adaptive spatial resolution.
    • Established a conversion relation for modal solutions between Cartesian and transformed systems.
    • Applied the method to multilayer metal-dielectric gratings, including metal patches in the microwave band.

    Main Results:

    • The proposed conversion relation enables modal solutions in the transformed system to match boundary conditions with other layers in the Cartesian system.
    • Achieved good convergence for metal patches in the microwave band.
    • Demonstrated suitability for multi-layer structure calculations.

    Conclusions:

    • The enhanced RCWA method significantly improves reliability for multilayer metal-dielectric gratings.
    • The established conversion relation is crucial for accurate boundary condition matching in complex structures.
    • The method is robust and suitable for diverse applications, including microwave optics.