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Integrated 1 × 3 MEMS silicon nitride photonics switch.

Suraj Sharma, Niharika Kohli, Jonathan Brière

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    This summary is machine-generated.

    This study introduces a novel 1x3 optical switch utilizing a microelectromechanical system (MEMS) platform and silicon nitride (SiN) photonic waveguides. The device achieves efficient signal transmission with low insertion loss, demonstrating a unique gap-closing mechanism for improved performance.

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    Area of Science:

    • Photonics and Microelectromechanical Systems (MEMS)

    Background:

    • Optical switches are crucial components in telecommunications and data centers.
    • Integrating photonic waveguides with MEMS platforms presents fabrication challenges, particularly concerning stress and signal loss.

    Purpose of the Study:

    • To develop and characterize a 1x3 optical switch using a translational MEMS platform with integrated silicon nitride (SiN) photonic waveguides.
    • To evaluate the insertion loss and transmission efficiency of the fabricated optical switch across a specific wavelength range.

    Main Methods:

    • Fabrication of a 1x3 optical switch using a custom microfabrication process.
    • Integration of SiN photonic waveguides with silicon-on-insulator (SOI) based MEMS devices.
    • Characterization of optical signal transmission and insertion loss over a wavelength range of 1530 nm to 1580 nm.

    Main Results:

    • Demonstrated efficient optical signal transmission between fixed and movable waveguides.
    • Reported minimum average insertion loss of 4.64 dB and maximum of 5.83 dB.
    • Achieved a maximum reduction of 7.89 dB in average insertion loss due to the gap-closing mechanism.

    Conclusions:

    • The developed MEMS-based optical switch with SiN waveguides offers efficient signal transmission.
    • The custom microfabrication process successfully integrates SiN waveguides with MEMS devices, minimizing stress-related deformation.
    • The unique gap-closing mechanism significantly reduces insertion loss, enhancing switch performance.