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Electrodes: Overview01:17

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There are two main types of electrodes in electrochemical cells. The first type, known as the working or indicator electrode, has a potential that is sensitive to the analyte's concentration and reacts to changes in...
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A CMOS Multi-Electrode Array for Four-Electrode Bioimpedance Measurements.

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    This study presents a novel complementary metal-oxide-semiconductor (CMOS) chip for multi-electrode array (MEA) bioimpedance measurements. The chip enables precise electrical impedance measurements for various biological applications.

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    Area of Science:

    • Electrical Engineering
    • Biomedical Engineering
    • Materials Science

    Background:

    • Bioimpedance measurements are crucial for assessing tissue properties.
    • Existing multi-electrode arrays (MEAs) often lack integration and scalability.
    • Need for miniaturized, high-resolution bioimpedance sensing platforms.

    Purpose of the Study:

    • To design and fabricate a CMOS chip for four-electrode bioimpedance measurements using an 8x8 MEA.
    • To demonstrate the chip's functionality for sensing electrical properties in liquids.

    Main Methods:

    • Fabrication of an 8x8 MEA on a CMOS chip (TSMC 180 nm process).
    • Integration of current-carrying (CC) and pick-up (PU) electrodes within each pixel.
    • On-chip instrumentation and transimpedance amplifiers for differential voltage and current measurements.
    • Electroless plating for electrode metallization (Zn/Ni/Au) and SU-8 encapsulation for wet experiments.

    Main Results:

    • Successful fabrication of the integrated MEA CMOS chip.
    • Demonstrated functionality through measurements in liquids of varying conductivities.
    • Verified performance of on-chip amplifiers for voltage and current sensing.

    Conclusions:

    • The developed CMOS MEA chip is a viable platform for four-electrode bioimpedance measurements.
    • This technology offers potential for miniaturized, high-density bioimpedance sensing.
    • The chip's design facilitates integration into various biomedical devices and applications.