Optimal experiment design for element specific atom counting using multiple annular dark field scanning transmission

D G Sentürk1, A De Backer1, T Friedrich1

  • 1Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium; NANOlab Center of Excellence, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.

Ultramicroscopy
|October 13, 2022
PubMed
Summary

This study optimizes atom counting in scanning transmission electron microscopy (STEM) by using statistical detection theory. Combining specific annular dark-field (ADF) detector regimes minimizes errors when identifying multiple atom types in atomic columns.

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