Highly Sensitive MEMS Sensor Using Bimetallic Pd-Ag Nanoparticles as Catalyst for Acetylene Detection

Area of Science:

• Materials Science
• Chemical Sensing
• Electrical Engineering

Background:

• Acetylene detection is crucial for power transformer fault diagnosis.
• Current dissolved gas analysis (DGA) methods are often bulky and time-consuming.
• Development of rapid, portable sensors is needed.

Purpose of the Study:

• To fabricate a high-performance acetylene sensor on a microhotplate chip.
• To utilize indium oxide (In2O3) as the primary sensing material.
• To enhance sensing response using palladium-silver (Pd-Ag) core-shell nanoparticles as catalysts.

Main Methods:

• Synthesis of Pd-Ag core-shell nanoparticles.
• Loading Pd-Ag catalysts onto an In2O3 sensing layer on a microhotplate.
• Characterization using transmission electron microscopy (TEM).
• Testing sensor performance for acetylene detection.

Main Results:

• The Pd-Ag core-shell nanoparticles exhibited catalytic activity.
• The fabricated In2O3-based microhotplate sensor showed high response to acetylene.
• Achieved a limit of detection (LOD) of 10 ppb for acetylene.
• Demonstrated good selectivity, repeatability, and fast response.

Conclusions:

• The developed microhotplate sensor offers a sensitive and efficient method for acetylene detection.
• The sensor shows significant potential for on-site power transformer fault diagnosis.
• This technology provides a viable alternative to traditional DGA techniques.