Low loss silicon nitride 1×4 microwave photonic beamforming chip

In this paper, based on the low loss double strip silicon nitride platform, we designed and fabricated an ultra-low loss 1×4 microwave photonic beamforming chip, which contains a 1×4 beam splitter and four 5-bit optical delay lines. Each optical delay line can achieve 32 delay states varying from 0 ps to about 130 ps, which can support 21 different beamforming angles covers from -56.42° to 56.68° for 10 GHz RF signal. A low on-chip insertion loss of about 4 dB is achieved for each 5-bit optical delay line. Furthermore, a very low loss delay ratio of about 0.0016 dB/ps is achieved and a recorded low loss fluctuation of about 0.3 dB is obtained during the 32 states delay switching. In addition, the switching speed and driving power consumptions of the proposed beamforming chip were investigated. The proposed beamforming chip could have great potential in optical controlled phased antenna arrays systems.