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Updated: Aug 25, 2025

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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Silicon nitride stress-optic microresonator modulator for optical control applications
Optics Express
|October 15, 2022
Summary
We developed a new silicon nitride modulator using piezo-electric actuation, significantly increasing bandwidth and reducing power consumption for photonic control applications. This advancement enables smaller, more scalable devices for quantum sciences, communications, and metrology.
Area of Science:
- Photonics and Optical Engineering
- Materials Science (Silicon Nitride)
- Quantum Technologies
Background:
- Modulation is crucial for controlling photonic components across visible-to-infrared applications.
- Current bulk-optic modulators are bulky, costly, and limit scalability.
- Integrating low-loss, low-power modulators onto wafer-scale platforms like silicon nitride is a key challenge.
Purpose of the Study:
- To develop a low-loss, wafer-scale, CMOS-compatible modulator integrated onto a silicon nitride platform.
- To improve modulator bandwidth, reduce power consumption, and maintain high performance for photonic control.
- To demonstrate the modulator's utility in critical applications like laser stabilization.
Main Methods:
- Integration of a piezo-electric (PZT) actuated micro-ring modulator within a fully-planar silicon nitride platform.
- Characterization of optical loss, bandwidth, extinction ratio, Q-factor, tuning efficiency, and linearity (SFDR, IMD3).
- Demonstration of laser stabilization using a Pound-Drever Hall (PDH) lock loop and laser carrier tracking.
Main Results:
- Achieved ultra-low optical loss (0.03 dB/cm) and high Q-factor (7.1 million) at 1550 nm.
- Demonstrated an order of magnitude increase in bandwidth (DC-15 MHz 3-dB) and reduced power consumption (20 nW).
- Showcased >14 dB extinction ratio, 162 MHz/V tuning efficiency, and excellent linearity (SFDR >65 dB·Hz^2/3).
- Successfully reduced laser frequency noise by 40 dB in a PDH lock loop.
Conclusions:
- The PZT-actuated silicon nitride micro-ring modulator represents a significant advancement for integrated photonics.
- This technology enables miniaturized, low-power, high-performance modulation for diverse visible-to-IR applications.
- Potential applications include atomic/molecular locking, optical frequency combs, quantum computing, and advanced communication systems.

