Rapid polishing process for the x ray reflector

Area of Science:

• Optics and Optical Engineering
• Materials Science
• Manufacturing Processes

Background:

• X-ray mirrors, essential components in optical systems, possess symmetry but present unique polishing challenges.
• The edge effect in X-ray mirrors hinders polishing accuracy and efficiency, unlike in simpler circular mirrors.

Purpose of the Study:

• To investigate the unique edge effect in X-ray mirrors.
• To develop and validate a novel polishing strategy to suppress this edge effect.
• To enhance the precision and efficiency of X-ray mirror manufacturing.

Main Methods:

• Analysis of the computer-controlled optical surface (CCOS) structure and polishing tool trajectories to understand edge effect causes.
• Development of a mathematical model based on material removal states across different mirror regions.
• Implementation and experimental verification of a combined polishing process utilizing varied tool influence functions.

Main Results:

• The proposed combined polishing process effectively weakened the edge effect in X-ray mirrors.
• Surface error measurements showed significant improvements, with peak-to-valley (PV) and root-mean-square (RMS) errors reduced.
• Experimental validation confirmed the efficacy of the combined polishing approach.

Conclusions:

• The combined polishing process demonstrates a substantial suppression effect on the edge effect of X-ray mirrors.
• This approach offers a viable solution for improving the polishing accuracy and efficiency of X-ray optical components.
• Further research can explore optimizations for different mirror geometries and materials.