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Emerging laser-assisted vacuum processes for ultra-precision, high-yield manufacturing
Eunseung Hwang1,2, Joonmyung Choi1,2, Sukjoon Hong1,2
1Department of Mechanical Design Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea. joonchoi@hanyang.ac.kr.
Nanoscale
|October 24, 2022
Summary
Laser-assisted vacuum processes (LAVPs) enhance manufacturing with precise control. This review explores LAVPs for breakthroughs in semiconductor and optoelectronic device fabrication.
Area of Science:
- Materials Science
- Chemical Engineering
- Physics
Background:
- Laser technology offers unique photothermal response, site selectivity, and remote controllability.
- Integration of lasers with high-vacuum equipment expands capabilities in semiconductor, display, and thin film industries.
- In situ and in operando laser assistance enables complex process environments beyond conventional vacuum equipment.
Purpose of the Study:
- To review recent research trends in laser-assisted vacuum processes (LAVPs).
- To examine the unique characteristics and mechanisms of lasers used in LAVPs.
- To highlight LAVPs as a vital tool for next-generation manufacturing equipment.
Main Methods:
- Review of recent research literature on laser-assisted vacuum processes.
- Analysis of laser characteristics and mechanisms employed in various applications.
- Examination of process parameter ranges and their impact on material properties.
Main Results:
- Laser assistance broadens the usable range of process parameters.
- Improved material properties, product precision, and device performance are achieved.
- LAVPs demonstrate potential for methodological breakthroughs.
Conclusions:
- Laser-assisted vacuum processes are key to innovation in next-generation manufacturing.
- LAVPs offer significant advantages over conventional vacuum equipment.
- These processes can drive advancements in dry etching, 2D material synthesis, and chemical vapor deposition for optoelectronics.
