A Micro-Displacement Measurement Based on the Shadow Technique
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Published on: May 20, 2013
Yong Yang1, Meirong Zhao1, Yinguo Huang1
1State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University.
Abstract:
The precision measurement of micro displacement is important in scientific and industrial fields. However, it is a tough challenge due to the complex design and the high cost of measuring instruments. Inspired by the shadow formed from water striders walking on a water surface under sunlight, a micro-displacement measurement method was proposed. Water strider legs with superhydrophobic properties bend the water surface. The curved surface of the water refracts sunlight, creating a shadow with a bright edge at the bottom of the pond. The shadow size is generally larger than the indentation depth of the legs from the water surface. In the micro-displacement measurement system, the applied displacement is proportional to the change in the diameter of the shadow. The presented study proposes a micro-displacement measurement procedure based on this shadow technique. The displacement sensitivity can reach 10.0 nm/pixel in the range of 5 µm. This system is simple to construct, low cost, and has high precision with good linear performance. The method provides a convenient additional option to measure micro-displacement.
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