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Updated: Aug 24, 2025

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
Gas-phase oxidation and nanoparticle formation in multi-element laser ablation plumes
Elizabeth J Kautz1, Alla Zelenyuk1, Bharat Gwalani1,2
1Pacific Northwest National Laboratory, Richland, WA 99352, USA. elizabeth.kautz@pnnl.gov.
Nanoparticle formation from laser-produced plasmas was investigated. Multi-principal element alloy targets in air form complex fractal agglomerates containing elements and their oxides, impacting gas-phase oxidation and particle structure.
Area of Science:
- Materials Science
- Plasma Physics
- Nanotechnology
Background:
- Laser-produced plasmas (LPPs) are crucial for nanoparticle synthesis.
- Understanding gas-phase oxidation and nanoparticle formation in LPPs is essential for controlling material properties.
Purpose of the Study:
- To investigate the evolution of gas-phase oxidation and nanoparticle formation in LPPs from a multi-principal element alloy target in air.
- To characterize the morphology, composition, and structure of the resulting nanoparticles and agglomerates.
Main Methods:
- In situ optical emission spectroscopy (OES) to monitor gas-phase oxidation.
- Custom-built single particle mass spectrometry (SPMS) to analyze nanoparticle size and composition.
- Ex situ transmission electron microscopy (TEM) for detailed nanoscale characterization.
Main Results:
- OES revealed element-specific gas-phase oxidation occurring at different times during plume evolution.
- SPMS showed fractal agglomerates composed of all principal alloying elements and their oxides.
- TEM identified agglomerates containing amorphous nanoparticles, Ti-rich oxide nanoparticles, and base material.
Conclusions:
- The multi-component target composition significantly influences gas-phase molecular formation.
- Nanoparticle and agglomerate morphology, composition, and structure are directly impacted by the target's elemental makeup and oxidation processes.
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