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Substrate-Independent Maskless Writing of Functionalized Microstructures Using CHic Chemistry and Digital Light
Dan Song1,2, Frederik Kotz-Helmer2, Bastian Rapp1,2
1livMatS @ Freiburg Center for Interactive Materials and Bioinspired Technologies (FIT), University of Freiburg, Georges-Köhler-Allee 105, 79110 Freiburg, Germany.
ACS Applied Materials & Interfaces
|October 26, 2022
Summary
Researchers developed a new material for digital light processing (DLP) maskless photolithography. This method enables rapid, versatile microfabrication with precise surface patterning on diverse substrates.
Area of Science:
- Materials Science
- Nanotechnology
- Photochemistry
Background:
- Digital Light Processing (DLP) maskless photolithography offers rapid, flexible, and cost-effective microfabrication.
- Existing methods face limitations in substrate compatibility and chemical versatility for complex surface patterning.
Purpose of the Study:
- To introduce a novel material system for DLP-based microfabrication using photoreactive polymers.
- To demonstrate a versatile method for creating microstructures with arbitrary geometries and chemistries on various substrates.
Main Methods:
- Utilizing a photoreactive polymer system for light-induced C,H-insertion cross-linking (CHic).
- Coating substrates with a solvent-free prepolymer film and patterning with a DLP system.
- Inducing local cross-linking via patterned light to form desired microstructures.
Main Results:
- Achieved fabrication of complex microstructures with lateral resolution of several microns and topography of tens of nanometers.
- Demonstrated rapid structure formation within 30 seconds.
- Confirmed universal applicability of the CHic reaction on a wide variety of substrates.
Conclusions:
- The CHic material system provides a simple and versatile approach for DLP-based microfabrication.
- This technique enables direct writing of surface functionalization patterns with high spatial control.
- The broad substrate compatibility significantly expands the application scope of DLP printing.

