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Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor.

Guizhen Du1,2, Xianshan Dong2, Xinglong Huang2,3

  • 1Institute of Advanced Wear & Corrosion Resistance and Functional Materials, Jinan University, Guangzhou 510632, China.

Micromachines
|October 27, 2022
PubMed
Summary

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This summary is machine-generated.

This study presents a mathematical model to predict vacuum degradation in Micro-Electro-Mechanical Systems (MEMS) sensors. The model aids in evaluating long-term performance and reliability by analyzing outgassing rates at various temperatures.

Area of Science:

  • Materials Science
  • Mechanical Engineering
  • Sensor Technology

Background:

  • Vacuum packaging is crucial for Micro-Electro-Mechanical Systems (MEMS) sensor performance.
  • Vacuum degradation over time negatively impacts the long-term reliability of MEMS sensors.

Purpose of the Study:

  • To develop a mathematical model for evaluating vacuum degradation in MEMS sensors.
  • To assess the long-term reliability of vacuum-packaged MEMS sensors.

Main Methods:

  • A mathematical model was developed to describe vacuum degradation.
  • Temperature-accelerated testing of MEMS gyroscopes was conducted at 85°C, 105°C, and 125°C.
  • The degradation of the Q-factor over time was analyzed at different temperatures.
Keywords:
MEMS sensormathematical modelreliability evaluationvacuum degradation

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Main Results:

  • Outgassing rates varied with temperature, with 85°C showing the highest (0.0531 cm²/s) and 105°C the lowest (0.0109 cm²/s).
  • The degradation rate did not strictly follow temperature due to diverse gas release mechanisms.
  • The developed model fits the observed Q-factor degradation over time.

Conclusions:

  • The mathematical model provides a method for predicting vacuum degradation in MEMS sensors.
  • Long-term reliability of vacuum-packaged MEMS sensors can be predicted at room temperature using this model.
  • Understanding outgassing rates is key to ensuring MEMS sensor longevity.