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Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
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Effect of Post-Annealing on Barrier Modulations in Pd/IGZO/SiO2/p+-Si Memristors
Donguk Kim1, Hee Jun Lee1, Tae Jun Yang1
1School of Electrical Engineering, Kookmin University, Seoul 02707, Korea.
Abstract:
In this article, we study the post-annealing effect on the synaptic characteristics in Pd/IGZO/SiO2/p+-Si memristor devices. The O-H bond in IGZO films affects the switching characteristics that can be controlled by the annealing process. We propose a switching model based on using a native oxide as the Schottky barrier. The barrier height is extracted by the conduction mechanism of thermionic emission in samples with different annealing temperatures. Additionally, the change in conductance is explained by an energy band diagram including trap models. The activation energy is obtained by the depression curve of the samples with different annealing temperatures to better understand the switching mechanism. Moreover, our results reveal that the annealing temperature and retention can affect the linearity of potentiation and depression. Finally, we investigate the effect of the annealing temperature on the recognition rate of MNIST in the proposed neural network.
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