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110 GHz, 110 mW hybrid silicon-lithium niobate Mach-Zehnder modulator
Forrest Valdez1, Viphretuo Mere2, Xiaoxi Wang2
1Department of Electrical and Computer Engineering, University of California, San Diego, 9500 Gilman Drive, MC 0407, La Jolla, CA, USA. fgvaldez@eng.ucsd.edu.
Scientific Reports
|November 4, 2022
Summary
We developed a high-performance thin-film lithium niobate Mach-Zehnder modulator (MZM) for advanced optical communications. This device handles high optical power and offers over 110 GHz bandwidth, improving analog systems and RF photonic links.
Area of Science:
- Photonics
- Materials Science
- Electrical Engineering
Background:
- High-performance electro-optic modulators are crucial for analog optical communications and RF photonic links.
- Existing technologies face limitations in optical power handling and bandwidth.
Purpose of the Study:
- To design and fabricate a novel thin-film lithium niobate (LN) Mach-Zehnder modulator (MZM).
- To achieve high optical power handling capability and high bandwidth in an MZM device.
Main Methods:
- Fabrication of a thin-film LN MZM utilizing hybrid optical modes by bonding LN to silicon photonic circuits.
- Employing tapered silicon waveguides to mitigate optically-generated carriers and enhance optical power handling.
- Characterization of the MZM's bandwidth, optical power handling, Vπ·cm product, and insertion loss.
Main Results:
- The fabricated MZM demonstrates a 3-dB bandwidth exceeding 110 GHz at 1550 nm.
- The device successfully handles a high optical power of 110 mW.
- Achieved a Vπ·cm product of 3.1 V·cm and an on-chip optical insertion loss of 1.8 dB.
Conclusions:
- The developed LN MZM offers a promising solution for high-performance analog optical communications and RF photonic links.
- The hybrid integration approach and waveguide tapering effectively address key performance bottlenecks.

