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Updated: Aug 22, 2025

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
A phosphoric anion layer inhibits electronic current generation and nanotube growth during anodization of titanium
Ziyu Zhao1, Shiyi Wang1, Jiazheng Zhang2
1Key Laboratory of Soft Chemistry and Functional Materials of Education Ministry, Nanjing University of Science and Technology Nanjing 210094 China soong_ye@sohu.com.
Abstract:
Nowadays the formation mechanism of anodic TiO2 nanotubes has attracted extensive attention. Field-assisted dissolution (TiO2 + 6F- + 4H+ → [TiF6]2- + 2H2O) has been considered as the causal link to the formation and growth of nanotubes. But it is hard for this theory to explain three stages of the current-time curve. Here, the anodization of titanium was studied by adding different concentrations of H3PO4 (0%, 4 wt%, 6 wt%, 8 wt%, and 10 wt%) in ethylene glycol containing the same concentration of NH4F (0.5 wt%). The results prove that under the action of the same concentration of NH4F, the growth rate of nanotubes decreases obviously with the increase of H3PO4 concentration, and the second stage of the current-time curve is also prolonged simultaneously. These experimental facts cannot be interpreted by field-assisted dissolution theory and the viscous flow model. Here, an anion layer formed by H3PO4 and the electronic current theory are ably used to explain these facts reasonably for the first time.

