High Performance of Zero-Power-Consumption MOCVD-Grown β-Ga₂O₃-Based Solar-Blind Photodetectors with Ultralow Dark...

In this article, we report on high-performance deep ultraviolet photodetectors (DUV PDs) fabricated on metal-organic chemical vapor deposition (MOCVD)-grown β-Ga₂O₃ heteroepitaxy that exhibit stable operation up to 125 °C. The fabricated DUV PDs exhibit self-powered behavior with an ultralow dark current of 1.75 fA and a very high photo-to-dark-current ratio (PDCR) of the order of 10⁵ at zero bias and >10⁵ at higher biases of 5 and 10 V, which remains almost constant up to 125 °C. The high responsivity of 6.62 A/W is obtained at 10 V at room temperature (RT) under the weak illumination of 42.86 μW/cm² of 260 nm wavelength. The detector shows very low noise equivalent power (NEP) of 5.74 × 10^-14 and 1.03 × 10^-16 W/Hz^1/2 and ultrahigh detectivity of 5.51 × 10¹¹ and 3.10 × 10¹⁴ Jones at 0 and 5 V, respectively, which shows its high detection sensitivity. The RT UV-visible (260:500 nm) rejection ratios of the order of 10³ at zero bias and 10⁵ at 5 V are obtained. These results demonstrate the potential of Ga₂O₃-based DUV PDs for solar-blind detection applications that require high-temperature robustness.