Machine Learning and Swarm Optimization Algorithm in Temperature Compensation of Pressure Sensors

Hexing Wang1,2, Jia Li1,2

  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.

Summary

This study introduces novel temperature compensation methods for MEMS piezoresistive pressure sensors using swarm optimization and machine learning. Optimized algorithms significantly enhance sensor accuracy across different operating ranges.

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