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Phase-resolved all-fiber reflection-based s-NSOM for on-chip characterization.

Yizhi Sun, Xiaohong Yan, Sylvain Blaize

    Optics Express
    |November 11, 2022
    PubMed
    Summary
    This summary is machine-generated.

    We developed a fiber-based near-field microscope for precise optical waveguide measurements. This technique accurately characterizes group index, loss, and dispersion in silicon photonic circuits.

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    Area of Science:

    • Photonics
    • Optical microscopy
    • Materials science

    Background:

    • Characterizing integrated photonic devices is crucial for advancing optical circuits.
    • Existing near-field microscopy techniques can be complex and sensitive to environmental noise.
    • Accurate measurement of waveguide parameters like group index and loss is essential for device performance.

    Purpose of the Study:

    • To present a convenient, all-fiber, reflection-based scattering-type near-field scanning optical microscope (s-NSOM) for phase-resolved measurements.
    • To enable accurate characterization of group index, loss, and dispersion in on-chip waveguides.
    • To address and mitigate measurement errors caused by environmental fluctuations.

    Main Methods:

    • Utilizing a phase-resolved, reflection-based s-NSOM with an all-fiber configuration.
    • Employing heterodyne detection for phase measurement and frequency-domain reflectometry for parameter extraction.
    • Implementing a phase compensation approach using a common-path interferometer to suppress phase drift.

    Main Results:

    • Demonstrated accurate and precise measurements on various silicon waveguides.
    • Achieved suppression of phase drift error to approximately 0.013°/s.
    • Obtained high accuracy in propagation loss measurement (±1 dB/cm for a 0.2 cm nano-waveguide).
    • Successfully characterized group index, group velocity dispersion, propagation loss, insertion loss, and return loss.

    Conclusions:

    • The developed s-NSOM technique offers a convenient and versatile platform for on-chip photonic circuit characterization.
    • The method provides high accuracy and precision, overcoming environmental noise challenges.
    • This technique facilitates in-depth studies of complex photonic integrated circuits.