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Steep freeform measurement method based on a normal transverse differential confocal.

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    A new normal transverse laser differential confocal freeform measurement (NTDCFM) method accurately measures steep freeform surfaces. This advanced technique overcomes challenges with inclination, scattering, and reflectivity for high-precision results.

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    Area of Science:

    • Optical Metrology
    • Surface Metrology
    • Freeform Optics Measurement

    Background:

    • Measuring steep freeform surfaces presents significant challenges due to variations in inclination, scattering, and reflectance.
    • Existing methods struggle to achieve high precision for complex surface geometries.

    Purpose of the Study:

    • To develop a novel measurement method for high-precision assessment of steep freeform surfaces.
    • To overcome limitations of current techniques in handling challenging surface properties.

    Main Methods:

    • Introduced a normal transverse laser differential confocal freeform measurement (NTDCFM) method.
    • Utilized D-shaped diaphragm technology to convert axial variations to transverse spot movement.
    • Employed a 2D position sensitive detector (PSD) for normal vector acquisition and sensor tracking.
    • Implemented a focus tracking mechanism to extend the measurement range.

    Main Results:

    • Achieved axial resolution better than 0.5 nm.
    • Obtained normal vector direction resolution of 0.1°.
    • Successfully measured surfaces with inclinations up to 90°.
    • Demonstrated a sensor measurement range of 5 mm.
    • Exhibited measurement repeatability of the freeform surface under test (FSUT) better than 9 nm.

    Conclusions:

    • The NTDCFM method offers an effective solution for measuring steep freeform surfaces.
    • The technique demonstrates robustness against inclination, scattering, and reflectivity.
    • Provides a new capability for high-accuracy metrology in optics manufacturing and research.