The Phase Modulating Micro-Mover Based on the MHD/MET System in the Reference Arm of the Scanning Interferometer

Sergey Kalenkov1, Pavel Skvortsov1,2, Aleksandr Tarasenko1

  • 1Scientific and Technical Center "Optoelectronics", Moscow Polytechnic University, ul. Bolshaya Semyonovskaya 38, 107023 Moscow, Russia.

Micromachines
|November 24, 2022
PubMed