(Cr_1-xAl_x)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering

The paper deals with the (Cr_1-xAl_x)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnetrons. It is shown that the higher Al content in the (Cr_1-xAl_x)N coating improves its hardness from 17 to 28 GPa. Regardless of the Al content, the (Cr_1-xAl_x)N coating manifests a low wear rate, namely (4.1-7.8) × 10^-9 and (3.9-5.3) × 10^-7 mm³N^-1m^-1 in using metallic (100Cr6) and ceramic (Al₂O₃) counter bodies, respectively. In addition, this coating possesses the friction coefficient 0.4-0.7 and adhesive strength quality HF1 and HF2 indicating good interfacial adhesion according to the Daimler-Benz Rockwell-C adhesion test.