Flower-like disk resonator for gyroscopic application

In this paper, we propose a novel, flower-like disk resonator (FDR). The structure is made up of concentrically meander-shaped rings that are interconnected by straight beams, which have the potential to provide lower resonant frequency, lower frequency split, higher quality factor (Q), and longer decay time (τ). In comparison to the traditional ring-like disk resonator (RDR), the FDR has better immunity to crystal orientation error and fabrication errors owing to its all-linear structure. The prototype of this design is manufactured by silicon on insulator fabrication technique. The frequency response test and quality factor test are implemented at room temperature and under vacuum (5 Pa) using a readout circuit with feed-through cancellation. The results show that the frequency split of the FDR is less than 7.7 Hz without electrostatic tuning. The Q and τ are 21 883 and 0.69 s, respectively. With the same structure parameters, the resonant frequency and frequency split are decreased by 39.1% and 70.2%, and the Q and τ are greatly improved by 63.8% and 172%, respectively, compared to the RDR.