Flower-like disk resonator for gyroscopic application.

Area of Science:

• Microelectromechanical systems (MEMS)
• Resonator technology
• Nanofabrication

Background:

• Traditional ring-like disk resonators (RDRs) face limitations in frequency stability and performance due to fabrication and crystal orientation errors.
• Improving the quality factor (Q) and decay time (τ) is crucial for advanced sensor and oscillator applications.

Purpose of the Study:

• To introduce a novel flower-like disk resonator (FDR) design.
• To evaluate the FDR's performance characteristics, including resonant frequency, frequency split, Q factor, and decay time.
• To compare the FDR's advantages over traditional RDRs.

Main Methods:

• Fabrication of an FDR prototype using silicon on insulator (SOI) technology.
• Experimental testing of frequency response and Q factor under room temperature and vacuum conditions (5 Pa).
• Utilized a readout circuit with feed-through cancellation for accurate measurements.

Main Results:

• The FDR exhibited a frequency split of less than 7.7 Hz without electrostatic tuning.
• Achieved a quality factor (Q) of 21,883 and a decay time (τ) of 0.69 s.
• Compared to RDRs with identical parameters, the FDR demonstrated a 39.1% decrease in resonant frequency, a 70.2% reduction in frequency split, and significant improvements in Q factor (63.8%) and decay time (172%).

Conclusions:

• The flower-like disk resonator (FDR) design offers superior performance metrics compared to traditional ring-like disk resonators (RDRs).
• The FDR's all-linear structure provides enhanced immunity to fabrication and crystal orientation errors.
• The proposed FDR is a promising candidate for high-performance micro-resonator applications.