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Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

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Light addressable potentiometric sensor with well-ordered pyramidal pits-patterned silicon.

Jie Tan¹, Shibin Liu¹, Jiezhang Luo¹

¹School of Electronics and Information, Northwestern Polytechnical University, Xi'an, Shaanxi, 710072, PR China.

Analytica Chimica Acta

|December 4, 2022

Summary

This summary is machine-generated.

Researchers developed a low-cost, high-performance silicon-based Light Addressable Potentiometric Sensor (LAPS) using microsphere lithography. This sensor offers improved anti-interference capabilities for chemical and biological analysis.

Keywords:

Imaging Microsphere lithography Silicon-based light addressable potentiometric sensor Well-ordered pyramidal pits-patterned silicon pH sensing

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Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates

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Published on: July 2, 2012

Area of Science:

Materials Science
Sensor Technology
Biomedical Engineering

Background:

Light Addressable Potentiometric Sensors (LAPS) are field-effect sensors detecting potential changes via light pulses.
Current challenges include developing low-cost, robust, and high-performance silicon-based LAPS.
Two-dimensional imaging of chemical/biological species is enabled by scanned light pulses.

Purpose of the Study:

To fabricate a novel silicon-based LAPS using microsphere lithography and wet etching.
To create well-ordered, tunable, and low-cost pyramidal pits-patterned silicon for LAPS semiconductor applications.
To evaluate the sensing characteristics and pH imaging performance of the developed LAPS.

Main Methods:

Fabrication of pyramidal pits-patterned silicon using microsphere lithography and wet etching.
Characterization of the morphology and optical properties of the patterned silicon.
Testing and evaluation of LAPS sensing characteristics, including pH response and photocurrent enhancement.

Main Results:

The pyramidal pits-patterned silicon exhibited favorable morphology and optical properties.
The developed LAPS demonstrated acceptable pH response and good long-term stability.
High performance was achieved in photocurrent enhancement ratio, signal-to-noise ratio, and pH imaging.

Conclusions:

The proposed method provides a simple, low-cost approach for fabricating high-performance LAPS.
The pyramidal pits-patterned silicon LAPS shows strong anti-interference capabilities.
This device is suitable for pH-related chemical and biological analyses.