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Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved

Konstantinos Efstathios Falidas1, Kati Kühnel1, Matthias Rudolph1

  • 1Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany.

Materials (Basel, Switzerland)
|December 11, 2022
PubMed

Keywords:
3-D MIM capacitorsAl-dopingMIM capacitorsZrO2decoupling capacitorsdielectrichigh-κ

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