Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing

Area of Science:

• Materials Science
• Nanotechnology
• Additive Manufacturing

Background:

• Focused electron beam induced deposition (FEBID) is a key additive manufacturing technique for creating complex 3D nanostructures.
• Post-growth processing of FEBID deposits is crucial for tailoring nanostructure properties and functionality.

Purpose of the Study:

• To investigate the effects of post-growth electron beam curing (EBC) on platinum-based FEBID deposits.
• To explore the potential of EBC for controlled morphological deformation and the creation of advanced nano-architectures.

Main Methods:

• Platinum-based nanostructures were fabricated using FEBID.
• Post-growth EBC was applied to free-standing, sheet-like FEBID elements without precursor gas.
• Characterization was performed using Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Atomic Force Microscopy (AFM).
• Monte Carlo simulations were employed to complement experimental characterization.

Main Results:

• EBC successfully deformed platinum-based FEBID deposits in a targeted manner.
• The process led to diminished volumes in irradiated regions and altered nano-grain sizes.
• Controlled and reproducible conditions for smooth, stable morphological bending were identified.
• A range of parameters influencing the EBC process were systematically varied.

Conclusions:

• Local EBC is a viable tool for manipulating and reshaping 3D nanostructures.
• This technique offers a pathway to create complex nano-architectures, including overhanging structures, beyond current 3D-FEBID capabilities.
• EBC opens new prospects for advanced research, development, and functional imprinting applications.